| MicroElectroMechanical Systems
(MEMS) deformable mirrors are currently the most
widely used technology in wavefront shaping applications
given their versatility, maturity of technology,
and the high resolution wavefront correction that
they afford. Using advanced, inexpensive manufacturing
technology, the performance strengths of MEMS DMs are
inherent to micromachining:
- Thousands of Actuators: large
actuator arrays allow for high resolution wavefront
correction.
- Sophisticated Surface Control: advanced
microstructures minimize the influence between
neighboring actuators, permitting high frequency shapes on the mirror
surface and making high order correction possible.
- High Speed: BMC's optimized design
enables rapid wavefront shaping for high speed
applications.
- Low Cost: starting at $5000,
BMC DMs uses a semiconductor
fabrication process that lends itself to small
sizes and low costs. With widening applications and increasing demand, the future for MEMS DMs is high-volume, low cost commercial applications.
Matching the performance of
their large-scale counterparts, MEMS mirrors have
been shown to meet the needs of applications such
as microscopy, astronomy, vision science, laser
beam shaping, and a variety of defense applications. |
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