Visit Boston Micromahines' LinkedIn Page
Visit Boston Micromachines' Youtube Page
Visit Boston Micromachines' Twitter Page

Visit us at:

Visit Boston Micromachines' Facebook Page
Shaping Light Blog

T: 617-868-4178   


Boston Micromachines Corporation customer service

Want to learn more?

Download our Whitepapers for more

information on products and applications.

Home   |    Privacy Policy     |     Legal     |     Contact Us     |    Events

30 Spinelli Place | Cambridge, MA 02138

Phone: 617-868-4178 | Fax: 617-868-7996


Copyright 2016. Boston Micromachines Corporation. All rights reserved.

Upgrade to the X-Driver and receive the fastest in class response time from your deformable mirror setup.

Details and specifications can be found in the table below.

  • Specifications
  • Drivers
  • Software
  • Coatings
  • Upgrades
  • Downloads
  • Related Papers
  • Customer Support
Mirror Multi-C-1.5 Multi-3.5 NEW!!
Multi-5.5 Multi-SLM
Actuator Count
(13 across
the active aperture)
(12 across
the active aperture)
(12 across
the active aperture)
(12 across
the active aperture)
(12 across
the active aperture)
1.5µm 3.5µm 3.5µm 5.5µm 1.5µm (SLM)
3.6mm 4.4mm 4.95mm 4.95mm 3.6mm
300µm 400µm 450µm 450µm 300µm
Mechanical Response (10%-90%)
<40µsec <75µsec <75µsec <100µsec <20µsec
Approx. Interactuator Coupling (+/-5%)
15% 13% 13% 22% 0%

  • Zero hysteresis
  • Sub-nm average step size
  • Fill factor >99% (DM), 98% (SLM)
  • Surface figure: <30nm
  • Recommended operating temperature: -10C – 30C
  • Recommended storage temperature: -10C – 80C
  • Recommended relative humidity: <30%RH

Multi-Driver Specification

  • USB 2.0 interface
  • 120-240 VAC input
  • 14 bit step resolution
  • Maximum Frame Rate: 8 kHz
  • Dimensions(W × D × H): 9" x 7" x 2.5"

X-Driver Upgrade Specifications

  • DIO Interface: Camera Link via PCIe Interface Card
  • #Parallel HV Output Channels: 32 or 140
  • Maximum Output Voltage: 300 V
  • HV Interface: 37-Pin D-Sub Connector (4x)
  • Resolution: 14-bit
  • Voltage Step Size: 18mV
  • Latency: <2µsec
  • Single Channel Update Rate: 400 kHz
  • Maximum Frame Rate (140 Channels): 100 kHz
  • External Power Supply: 24 V DC, 2A Max
  • Dimensions(W × D × H): 9" x 7" x 2.5"

Software Specifications

  • Windows 7/10, Linux OS Compatible
  • Basic Operation software included
  • C/C++, Matlab, Python, and Labview drivers included
  • Linux drivers available

Mirror Coatings

  • Gold
  • Aluminum
  • Protected Silver (additional charge)

Protective Window with AR Coating

  • 350-700nm
  • 400-1100nm
  • 650-1050nm
  • 1050-1620nm
  • 550-2400nm (additional charge)

Open-Loop Calibration


An enhancement over simple voltage control

For users who prefer to operate our mirror in deflection-space over voltage-space, we offer an upgrade to our basic control software. This option simplifies the use of the mirror in open loop situations where closed-loop operation is not desired or orthogonal shapes need to be generated. This can be purchased with your mirror or any time thereafter to enhance your DM control experience. This capability can be implemented in your existing software setup using any of the already-available software drivers included with your Multi- or Mini-DM.


Hermetic Seal


Improved Isolation from Harsh Environments

For users who would like an added level of isolation from the elements, we offer hermetical sealing on select models of our deformable mirrors. These mirrors meet the requirements of the MIL-STD-883 specification. Prices vary based on product. Please contact us for more details.

Geoff Andersen, Paul Gelsinger-Austin, Ravi Gaddipati, Phani Gaddipati, Fassil Ghebremichael, “Fast, compact, autonomous holographic adaptive optics,” Optics Express.




Cahoy, K. ; Marinan, A. ; Kerr, C. ; Novak, B. ; Webber, M. ; Kasdin, N.J., “CubeSat Deformable Mirror Demonstration mission (DeMi),” Aerospace Conference, 2013 IEEE.


Andrew Norton ; Don Gavel ; Renate Kupke ; Marc Reinig ; Srikar Srinath ; Daren Dillon, “Performance assessment of a candidate architecture for real-time woofer-tweeter controllers: simulation and experimental results,” Proc. SPIE 8617, MEMS Adaptive Optics VII, 86170A (March 5, 2013); doi:10.1117/12.2000666.


Laura Marshall, “Q&A: Adaptive Optics ‘On the Rise’,” Photonics Media.


C. Baranec, R. Riddle, A. N. Ramaprakash, N. Law, S. Tendulkar, S. Kulkarni, R. Dekany, K. Bui, J. Davis, M. Burse, H. Das, S. Hildebrandt, S. Punnadi, R. Smith, “Robo-AO: autonomous and replicable laser-adaptive-optics and science system,” Proc. SPIE 8447, Adaptive Optics Systems III, 844704 (September 13, 2012).


Renate Kupke ; Donald Gavel ; Constance Roskosi ; Gerald Cabak ; David Cowley ; Daren Dillon ; Elinor L. Gates ; Rosalie McGurk ; Andrew Norton ; Michael Peck ; Christopher Ratliff ; Marco Reinig, “ShaneAO: an enhanced adaptive optics and IR imaging system for the Lick Observatory 3-meter telescope,” SPIE doi:10.1117/12.926470.

Software Support


Product Manual Download


If you have any other product questions, feel free to contact us at:

Boston Micromachines Corporation submit a proposal

Need Customer Support?

We are here to help with your questions on products, documentation downloads and getting you the latest software drivers.

Boston Micromachines Corporation download our whitepapers

Writing a proposal?

We support researchers in the grant application process.

Adaptive Optics 

Advanced wavefront control with MEMS deformable mirrors produce higher contrast, higher resolution imaging. Wavefront shaping is achieved by correcting high-order aberrations caused by optical limitations, atmospheric turbulence and tissue nonuniformities. BMC's MEMS deformable mirrors offer unsurpassed correction and control, dramatically improving imaging precision. Looking for a complete adaptive optics solution? Click below to find out more. 

Scientific Publications 

​Want to find out more about how our deformable mirrors have been used? Read all about them in the scientific publications page.

Deformable Mirror in Adaptive Optics system

low Actuator Count ​Deformable Mirrors

The Multi-DM: A versatile, robust deformable mirror system for advanced wavefront control. The popular and versatile Multi-DM offers sophisticated aberration compensation in an easy-to-use package. With 140 precisely controlled elements and low inter-actuator coupling, this system is ideal for a broad range of applications including microscopyretinal imaging, and laser beam shaping. Scroll down for more information on options.