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A high-precision deformable mirror for spectral phase control. The 1 × 96 and 1 × 32 actuator Linear Array Deformable Mirrors (DM's) were developed for use in laser pulse shaping applications in which the DM is used to modify the phase of the spectral components of the laser pulse to achieve a desired temporal pulse characteristic. The device design is a based on BMC’s heritage deformable mirror technology that uses hysteresis-free electrostatic actuators to deform a continuous or segmented mirror facesheet. Each active mirror area is supported by an array of electrostatic actuators, spaced at a pitch of 300 μm.