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Hex Architecture Schematic

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Diagram of the Hex Deformable Mirror tip/tilt facesheet actuators

Hex class deformable  mirrors

The Boston Micromachines Hex Class Deformable Mirrors offer an alternative to continuous and discrete segmented devices.

Well suited for an array of applications from in vivo microscopy to high-resolution astronomy, the Hex mirror architecture has the ability to tip, tilt and piston multiple segments for alternative wavefront control.

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Hex-111 Deformable Mirror

Inside its custom-fitted mount

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  • Specifications
  • Drivers
  • Software
  • Coatings
  • Upgrades
  • Downloads
  • Related Papers
  • Customer Support
Mirror Hex-111 Hex-111-X Hex-255 Hex-507 Hex-507-LL Hex-507-S Hex-1011 Hex-1011-LL Hex-1011-S Hex-3063
Actuator Count 111 111 255 507 507 507 1011 1011 1011 3063
Segment Count 37 37 85 169 169 169 337 337 337 1021
Stroke 3.5μm 3.5μm 3.5μm 3.5μm 3.5μm 1.0μm 3.5μm 3.5μm 1.0μm 1.5μm
Aperture 3.8mm 3.8mm 5.3mm 8.3mm 8.3mm 8.3mm 11.6mm 11.6mm 11.6mm 20.6mm
Frame Rate (Latency) 8kHz

  • Zero hystereses
  • Sub-nm average step size
  • Fill factor >99% (DM), 98% (SLM)
  • Surface figure: <40nm
  • Intra-Segment Interactuator Coupling (+/-5%): 13%
  • Mechanical Response (10%-90%): <25µsec
  • Custom actuator counts available upon request
  • Recommended operating temperature: -10C – 30C
  • Recommended storage temperature: -10C – 80C
  • Recommended relative humidity: < 30%RH

Multi-Driver Specification

  • USB 2.0 interface
  • 120-240 VAC input
  • 14 bit step resolution
  • Frame Rate: 8 kHz
  • Dimensions(W × D × H): 9" x 7" x 2.5"

X-Driver Upgrade Specifications

  • DIO Interface: Camera Link via PCIe Interface Card
  • #Parallel HV Output Channels: 32 or 140
  • Maximum Output Voltage: 300 V
  • HV Interface: 37-Pin D-Sub Connector (4x)
  • Resolution: 14-bit
  • Voltage Step Size: 18mV
  • Latency†: <2µsec
  • Single Channel Update Rate: 400 kHz
  • Full Array Frame Rate (140 Channels): 100 kHz
  • External Power Supply: 24 V DC, 2A Max
  • Dimensions(W × D × H): 9" x 7" x 2.5"

Kilo-Class Driver Specifications

  • DIO Interface: SFP fiber link connection via PCIe Interface Card
  • 14 bit step resolution
  • Maximum Frame Rate: 34 kHz
  • Response Time: as low as 22µsec
  • Dimensions: 5.25" x 19" 14"

S-Driver Specification

  • DIO interface: SFP fiber link (2.5 Gbps)
  • Latency†: 22.7 µsec
  • Maximum Frame Rate: 60 kHz
  • Resolution: 12 Bit
  • Average Voltage Step Size: 14 mV
  • Dimensions: 3.5" x 19" x 14" (3U Chassis for 19" Rack)
  • Connector Dimensions (W x D x H): 3.5" x 12" x 19"
  • Power Requirements: 120V 3A / 240 V, AC available

Low-Latency Upgrade Specifications

  • DIO Interface: SFP fiber link connection via PCIe Interface Card
  • Interface HV: 4 x 300 pin Megarray (1024 channel)
  • Form Factor: 3U Chassis ( 5.25" x 19" x 14")
  • Latency†: 17µsec
  • Maximum Frame Rate: 60 kHz
  • Power Draw: 40W
  • Current Limitation Output: 0.7 mA max.
  • Maximum Output Voltage: 295 V

† Latency defined as 1st word generated to last DAC updated


Software Specifications

  • Windows XP/7/8/10, Linux OS Compatible
  • Basic Operation software included
  • C/C++, Matlab, Python, and Labview drivers included
  • Linux drivers available

Mirror Coatings

  • Gold
  • Aluminum
  • Protected Silver (additional charge)

Protective Window with AR Coating

  • 400-1100nm
  • 1550nm
  • 550-2400nm (additional charge)

Open-Loop Calibration


An enhancement over simple voltage control

For users who prefer to operate our mirror in deflection-space over voltage-space, we offer an upgrade to our basic control software. This option simplifies the use of the mirror in open loop situations where closed-loop operation is not desired or orthogonal shapes need to be generated. This can be purchased with your mirror or any time thereafter, to enhance your DM control experience. This capability can be implemented in your existing software setup using any of the already-available software drivers included with your Multi- or Mini-DM.


Hermetic Seal


Improved Isolation from Harsh Environments

For users who would like an added level of isolation from the elements, we offer hermetical sealing on select models of our deformable mirrors. These mirrors meet the requirements of the MIL-STD-883 specification. Prices vary based on product. Please contact us for more details.

Software Support


Product Manual Download


If you have any other product questions, feel free to contact us at:

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