Continuous and Segmented
Deformable Mirrors
Boston Micromachines’
deformable mirrors are advanced wavefront control
devices consisting of a mirror membrane supported
by an underlying actuator array. Each actuator
in the array can be individually deflected by
electrostatic actuation to achieve the desired
pattern of deformation. Unlike piezoelectric mirrors,
electrostatic actuation ensures mirror deformation
without hysteresis.
The Continuous Deformable Mirror has a continuous
mirror membrane, while the Segmented Deformable
Mirror (Spatial Light Modulator) has a segmented
mirror membrane that provides for decoupled actuator
deflection.
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