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MicroElectroMechanical Systems (MEMS) deformable mirrors are currently the most widely used technology in wavefront shaping applications given their versatility, maturity of technology, and the high resolution wavefront correction that they afford. Using advanced, inexpensive manufacturing technology, the performance strengths of MEMS DMs are inherent to micromachining:
Matching the performance of their large-scale counterparts, MEMS mirrors have been shown to meet the needs of applications such as microscopy, astronomy, vision science, laser beam shaping, and a variety of defense applications.
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Boston Micromachines' mirrors are being used by leading manufacturers of optical imaging and communication systems, governmental agencies and contractors, and vision science research laboratories worldwide, including The Photonics Center at Boston University, NASA's Jet Propulsion Laboratory, NASA's Goddard Space Flight Center, DARPA, Army Research Lab, UCal Berkeley, Lockheed Martin, National Eye Institute, Center for Adaptive Optics, Rensselaer Polytechnic Institute, and Lawrence Livermore National Laboratory.