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Boston Micromachines' mirrors are being used by leading manufacturers of optical imaging and communication systems, governmental agencies and contractors, and vision science research laboratories worldwide, including The Photonics Center at Boston University, NASA's Jet Propulsion Laboratory, NASA's Goddard Space Flight Center, DARPA, Army Research Lab, UCal Berkeley, Lockheed Martin, National Eye Institute, Center for Adaptive Optics, Rensselaer Polytechnic Institute, and Lawrence Livermore National Laboratory.

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MEMS Deformable Mirror

MicroElectroMechanical Systems (MEMS) deformable mirrors are currently the most widely used technology in wavefront shaping applications given their versatility, maturity of technology, and the high resolution wavefront correction that they afford. Using advanced, inexpensive manufacturing technology, the performance strengths of MEMS DMs are inherent to micromachining:

  • Thousands of Actuators: large actuator arrays allow for high resolution wavefront correction

  • Sophisticated Surface Control: advanced microstructures minimize the influence between neighboring actuators, permitting high frequency shapes on the mirror surface and making high order correction possible

  • High Speed: BMC's optimized design enables rapid wavefront shaping for high speed applications


  • Low Cost: starting at $5000, BMC DMs use a semiconductor fabrication process that lends itself to small sizes and low costs. With widening applications and increasing demand, the future for MEMS DMs is high-volume, low cost commercial applications

Matching the performance of their large-scale counterparts, MEMS mirrors have been shown to meet the needs of applications such as microscopyastronomyvision sciencelaser beam shaping, and a variety of defense applications.

MEMS Deformable Mirrors